Electric-Current Controlled Liquid Phase Epitaxy of Compound Semiconductors for Microwave Devices.
Abstract
A study has been made to determine the growth rate and the mechanism responsible for the growth of InP epitaxial layers while applying an electric current across the melt-substrate interface, maintaining a constant overall temperature. The object of the study was to produce layers of thicknesses up to 100 micrometers with a constant residual impurity profile for impurity levels of approximately 2 x 10 to the 15th cu cm for use in Gunn diodes and other microwave devices.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1979
- Accession Number
- ADA072643
Entities
People
- Bart Van Rees
- Colin E. C. Wood
- Lester F. Eastman
Organizations
- Cornell University College of Engineering