Acoustic Waves in Cubic Crystals: Networks for Semiconducting Vibrators, and Applications to Gallium Arsenide.
Abstract
Some consequences of acoustic bulk wave propagation in piezoelectric semiconductors of class 4-bar 3m are investigated. Doubly rotated plate vibrators are considered, as are coupled modes and transmission line equivalent networks. It is shown how sensitive measurements of oxide films may be simply made in a nondestructive manner by use of such crystals as piezoelectric vibrators. Calculations are carried out using gallium arsenide as a typical compound. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 01, 1979
- Accession Number
- ADA072764
Entities
People
- Arthur D. Ballato
- Charles D. Bosco
Organizations
- United States Army Communications-Electronics Command