Interactions of Molecular and Ion Beams With Surfaces.
Abstract
Low kinetic energy active ion bombardment of transition metals, Si, Ge, Sn, Pb, graphite, and diamond have shown that chemical reactions can be induced between ion beams and surfaces. These reactions are specific and selective with respect to the ion-target combination and the thickness of the reacted layer can be controlled by varying the ion energy. The techniques of x-ray and UV photoelectron spectroscopy, Auger spectroscopy, secondary ion mass spectrometry (SIMS) and thermal desorption spectrometry (TDS) under ultra-high vacuum conditions are used to characterize the products of the beam-surface reactions. The reaction of 30-3000 eV nitrogen beams with the first-row transition metals results in the formation of metal nitrides. The amount of nitrogen reacting with the metal can be correlated to the enthalpy of formation of the metal nitride. Reactions of nitrogen with M, MO, and MO2 (M = Si, Ge, Sn, Pb) produces nitrides with no evidence for nitrate, nitrite, or nitroso formation in the oxides. A mechanism is proposed for the reaction which involves charge exchange neutralization and dissociation of the ion at the surface followed by penetration into the lattice, thermalization, and finally chemical reaction.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 21, 1979
- Accession Number
- ADA073278
Entities
People
- J. Wayne Rabalais
Organizations
- University of Houston