Growth and Characterization of Epitaxial Piezoelectric and Semiconductor Films.

Abstract

This report includes the details of research work on this two-year project on the growth and characterization of thin films for piezoelectric applications. The report covers the results on A1N and ZnO growth by the metal-organic process. The problems associated with the A1N on sapphire system have been discussed. In the case of ZnO films, low temperature CVD system (DEZ/H2O and DEZ/CO2) have been developed. It is seen that the films grown by the DEZ/CO2 system do not need any post-growth diffusion, as the as-grown resistivity is quite high. (Author)

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Jul 01, 1979
Accession Number
ADA073813

Entities

People

  • K. M. Lakin
  • S. K. Tiku

Organizations

  • University of Southern California

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Acoustic Waves
  • Chemical Vapor Deposition
  • Chemistry
  • Composite Materials
  • Electronics Industry
  • Films
  • Low Temperature
  • Materials
  • Materials Processing
  • Materials Science
  • Semiconductors
  • Surface Acoustic Waves
  • Temperature Coefficients
  • Thick Films
  • Thin Films
  • Transducers
  • Two Dimensional

Fields of Study

  • Materials science

Readers

  • Materials Science and Engineering.
  • Technical Research and Report Writing.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems