Study of Electronic Transport and Breakdown in Thin Insulating Films

Abstract

Recent progress is reported in an ongoing program of studies of high- field effects in thin insulating films on semiconducting substrates. The investigations reported here include further studies of the high-field generation of interface states in the Si-SiO2 system, a comparison between the effects of ionizing radiation and high-field stress in generating interface states in MOS capacitors, and a study of the characteristics of charge trapping in CVD Al2O3 on silicon.

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Document Details

Document Type
Technical Report
Publication Date
Dec 01, 1978
Accession Number
ADA074457

Entities

People

  • Walter C. Johnson

Organizations

  • Princeton University

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Aluminum Oxides
  • Band Gaps
  • Charged Particles
  • Conduction Bands
  • Crystal Structure
  • Demographic Cohorts
  • Electrical Engineering
  • Electrons
  • Energy Bands
  • Energy Levels
  • Ionizing Radiation
  • Low Temperature
  • Measurement
  • Operating Systems
  • Plastic Explosives
  • Radiation
  • Spatial Distribution

Fields of Study

  • Physics

Readers

  • Materials Science and Engineering.
  • Molecular Photonics/Laser Physics
  • Pulsed Power and Plasma Physics.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene