Development of Charge Transfer Devices for 1-2 Micron Imaging.
Abstract
There is considerable interest in the development of an imaging system within the wavelength range of 1.0 -1.8 micron. The concept of charge coupled devices emerges as one of the viable candidates for such an application. The advantages of a non-MIS, Schottky barrier, buried channel CCD, are discussed. Various configurations for backside illuminated devices are considered. The simplest representative configuration for evaluation of the concept consists of Schottky gates deposited on an active n-type channel supported by a p-type substrate. Analysis of the CCD shows that the optimum gap spacing is about 1 micron between gate electrodes to insure high charge transfer efficiency. Efforts in both materials growth and processing aimed at the development of this device are reported. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 01, 1978
- Accession Number
- ADA074641
Entities
People
- I. Deyhimy
- J. S. Harris
- K. Wong