Infrared Laser Window Coating by Plasma Polymerization
Abstract
This is the final report on the DARPA contract No. 19628-75-C-0097 on Infrared Laser Window Coating by Plasma Polymerization was to prepare protective and anti-reflection coatings for infrared laser windows by depositing a thin film from the hydrocarbon plasma. The introduction section outlines state-of- the-art knowledge of plasma polymerization and the rationale of this approach. Next the details of plasma polymerization of several simple saturated hydrocarbons were investigated. Here the radiofrequency glow discharge method was used as the method of generating plasma. We then investigate the effect of changing the frequency of the plasma on one of the most promising monomers, i.e. , ethane. Finally, the preferred method of preparing laser window coating, namely the plasma polymerization of ethane using pulsed radiofrequency plasma.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 1979
- Accession Number
- ADA075008
Entities
People
- Meikun Shen
Organizations
- University of California, Berkeley