ISS/SIMS Characterization of UV/O3 Cleaned Surfaces.

Abstract

When solids are irradiated with ultraviolet light from a low pressure mercury discharge tube (UV/03), a complex reaction involving interaction of both photons and ozone produces a cleaning action on the surface. In this work, the efficiency of the UV/O3 method is evaluated using ISS and SIMS. The UV/O3 method is found to be useful for both surface cleaning and storage following cleaning by conventional techniques. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Oct 01, 1979
Accession Number
ADA078425

Entities

People

  • W. L. Baun

Organizations

  • Air Force Research Laboratory

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Adhesive Bonding
  • Air Force
  • Air Force Facilities
  • Aluminum
  • Aluminum Alloys
  • Composite Materials
  • Discharge Tubes
  • Ion Beams
  • Mass Spectra
  • Mass Spectrometry
  • Materials
  • Materials Laboratories
  • Mechanics
  • Radiation
  • Spectra
  • Spectrometers
  • Spectrometry

Readers

  • Environmental Engineering.
  • Thin Film Deposition Science.