Program to Design, Develop, Fabricate and Deliver Thin Film Chip Inductors Suitable for Hybrid Circuit Applications.
Abstract
Inductors were fabricated using thin film techniques. The winding of an inductor was formed by depositing alternate layers of metal and dielectric material in steps of one-half turns. The optimization of Q-factor and self-resonant frequency were discussed. Comparison of circular and square geometry were made indicating that the circular one was preferred. Use of magnetic ferrite substrate to increase the inductance and the Q-factor has been achieved. Different methods for the measurements of inductance and Q-factor were described and the results of the measurement of a thin film inductor were given. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 13, 1979
- Accession Number
- ADA078840
Entities
People
- Stephen T. C. Chen