Program to Design, Develop, Fabricate and Deliver Thin Film Chip Inductors Suitable for Hybrid Circuit Applications.

Abstract

Inductors were fabricated using thin film techniques. The winding of an inductor was formed by depositing alternate layers of metal and dielectric material in steps of one-half turns. The optimization of Q-factor and self-resonant frequency were discussed. Comparison of circular and square geometry were made indicating that the circular one was preferred. Use of magnetic ferrite substrate to increase the inductance and the Q-factor has been achieved. Different methods for the measurements of inductance and Q-factor were described and the results of the measurement of a thin film inductor were given. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Nov 13, 1979
Accession Number
ADA078840

Entities

People

  • Stephen T. C. Chen

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Capacitance
  • Ceramic Materials
  • Crystal Detectors
  • Detectors
  • Dielectric Permittivity
  • Dielectrics
  • Electrical Resistance
  • Films
  • Geometry
  • Impedance
  • Magnetic Materials
  • Materials
  • Q Factor
  • Q Meters
  • Resonant Frequency
  • Silica Glass
  • Thin Films

Readers

  • Electronics Engineering
  • Phased Array Antenna Design.
  • Superconducting Magnet Technology