A Computer-Automated Temperature Control System for Semiconductor Measurements.

Abstract

A computer-automated temperature control system is described in this report to completely automate data acquisition for the characterization of electrical properties of semiconductor devices and materials. Temperature is monitored by a type T thermocouple embedded in a heat sink surrounding the sample. Liquid nitrogen provides a reference temperature for the thermocouple. Steady state is established by computer control of the current in a heater wire wrapped around a block of copper on which the solid state device is mounted. A proportional plus integral control is implemented as a computer.

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Document Details

Document Type
Technical Report
Publication Date
Nov 01, 1979
Accession Number
ADA079055

Entities

People

  • C. T. Sah
  • Philip C. H. Chan
  • Roger Nohl Switzer

Organizations

  • University of Illinois Urbana–Champaign

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Accuracy
  • Acquisition
  • Closed Loop Systems
  • Computer Programming
  • Computer Programs
  • Computers
  • Control Systems
  • Data Acquisition
  • Electrical Properties
  • Electronics Laboratories
  • Equations
  • Measurement
  • Semiconductor Devices
  • Semiconductors
  • Solid State Electronics
  • Specific Heat
  • Temperature Gradients

Fields of Study

  • Physics

Readers

  • Nanocomposite Materials Science
  • Software Engineering.
  • Thermal Physics or Thermal Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems