The Effect of Dopant Transport Rate on Crystalline Damage in Silicon.
Abstract
Studies are described of the volatilization of hydrogen B2O3 species in control water vapor ambients and the reaction with silicon to form boron silicide which are used to control defects in the silicon. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 17, 1980
- Accession Number
- ADA080569
Entities
People
- Joseph Stach
- R. E. Tressler
Organizations
- Pennsylvania State University