Qualitative Aspects of an Inductively Coupled Plasma in the Spectral Region between 120 and 185 nm.

Abstract

Investigations of the atomic emission lines produced by a variety of non-metals in the vacuum ultraviolet spectral region are reported. A number of promising analytical lines for oxygen, nitrogen, carbon, bromine, sulfur, and chlorine were observed between 120 and 185 nm using both photographic and electronic detection. A unique experimental configuration employing a side-arm torch which directly couples to the vacuum spectrometer/spectrograph is described. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1980
Accession Number
ADA080629

Entities

People

  • D. R. Heine
  • J. S. Babis
  • M. Bonner Denton

Organizations

  • University of Arizona

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Amplifiers
  • Assembly
  • California
  • Chemistry
  • Detection
  • Detectors
  • Elements
  • Flow Rate
  • Materials Laboratories
  • Measurement
  • Military Research
  • New York
  • Nitrogen
  • Power Amplifiers
  • Spectra
  • Spectroscopy
  • United States

Fields of Study

  • Physics

Readers

  • Combustion and Flow Dynamics.
  • Microwave Engineering.
  • Molecular Photonics/Laser Physics

Technology Areas

  • Microelectronics