Study of Electronic Transport and Breakdown in Thin Insulating Films
Abstract
Recent progress is reported in an ongoing program of studies of high- field effects in thin insulating films on semiconducting substrated. The investigations include further studies of the high-field generation of interface states in the Si-SiO2 system, description of a method for measuring interface state densities at low temperatures, a preliminary report of Auger observations of interface states in the Si-SiO2 system, and the results of further studies of high-field effects in the metal-aluminum oxide-silicon system.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 1979
- Accession Number
- ADA081135
Entities
People
- Walter C. Johnson
Organizations
- Princeton University