One Meter KrF Laser System
Abstract
This interim report covers research directed towards the development of efficient, high power, UV/visible lasers. The key issues being addressed are: (1) e-beam and e-beam controlled discharge excitation, (2) laser kinetics and modeling, (3) discharge stability and enhancement, (4) laser medium gain, adsorption and energy extraction, and (5) intrinsic laser efficiency and scaling. Using e-beam controlled discharge pumping of Hg/Cl2/Ar mixtures, a HgCl intrinsic laser efficiency of 3% was obtained at a specific energy of 1.4 J/ liter. The laser performance was found to be adversely affected by high active medium absorption and poor branching into HgCl* from 3P0 and 3P1 states of Hg*. The efficiency of e-beam excited KrF lasers was shown to improve with heating of the laser mixture. This improvement was shown to be consistent with the theoretically calculated reduction in three body quenching of KrF* with increasing temperature. An XeF specific laser energy of 14 J/liter was achieved in 3 amagat mixture of NF3/Xe/Ne with 5% intrinsic efficiency. The rate constants for XeF ground state vibrational mixing and dissociation have been calculated theoretically. These calculations have been compared with experimental data.
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 23, 1979
- Accession Number
- ADA084014
Entities
People
- C. Duzy
- J. C. Hsia
- J. H. Jacob