PROFILE: A General Code for Fitting Ion Beam Analysis Spectra
Abstract
A general program for analyzing energy distributions of particles scattered in ion beam experiments has been developed. This program uses numerical integration methods to model elastic scattering and nuclear reaction spectra from known cross sections, energy loss data and assumed depth concentration profiles of surface constituents. Direct comparison of the predicted and experimental distributions yields detailed, quantitative information about these depth concentration profiles in a complicated surface. The program is capable of analyzing all hydrogen or helium ion elastically scattered distributions and the (d,p) nuclear reaction peaks due to carbon, nitrogen, and oxygen. Analysis of the elemental concentration profiles of the surfaces of three different samples is discussed.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 01, 1980
- Accession Number
- ADA084984
Entities
People
- A. Niiler
- J. Gerrits
- R. Birkmire
Organizations
- Ballistic Research Laboratory