Transport in Thermally Grown Silica on Silicon.

Abstract

The oxidation kinetics of thermally grown silica on silicon are examined. It is concluded that the current kinetic equations do not agree with the proposed defect models for transport through silica. Suggestions for additional experiments are made. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1980
Accession Number
ADA085522

Entities

People

  • J. Bruce Wagner Jr.

Organizations

  • United States Army Communications-Electronics Command

Tags

DTIC Thesaurus Topics

  • Birds
  • Ceramic Materials
  • Compound Semiconductors
  • Electrical Conductivity
  • Electron Microscopy
  • Electronics
  • Electronics Industry
  • Equations
  • Films
  • High Temperature
  • Kinetics
  • Materials
  • Oxidation
  • Oxides
  • Silicon Carbide
  • Transport Ships
  • Water Vapor

Readers

  • Combustion science or combustion engineering.
  • Materials Science and Engineering.
  • Theoretical Analysis.