Electron Paramagnetic Resonance Characterization and Monitoring of Silicon Detector Materials.

Abstract

The general objective of the work reported here was to apply the Electron Paramagnetic Resonance (EPR) technique to the characterization and monitoring of impurities and dopants in silicon detector materials. Silicon is the focus of the detector materials program. The thrust of this project was divided into two parts, one specific project and a second more general one. The first was a study of indium-doped silicon, and was an attempt to aid in the understanding of the so-called 'X-level'. This understanding is very important to the development of detectors for the 3-5 micrometer range. The second part was of a more general study of defects in silicon detector materials using Electron Paramagnetic Resonance.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Jun 01, 1979
Accession Number
ADA088809

Entities

People

  • George K. Miner

Organizations

  • University of Dayton

Tags

DTIC Thesaurus Topics

  • Air Force
  • Annealing
  • Detection
  • Detectors
  • Electron Paramagnetic Resonance
  • Hall Effect
  • Heat Treatment
  • Infrared Detectors
  • Integrated Circuits
  • Ion Implantation
  • Magnetic Fields
  • Magnetic Resonance
  • Materials Laboratories
  • Measurement
  • Optical Properties
  • Paramagnetic Resonance
  • Resonance

Readers

  • Materials Science and Engineering.
  • Semiconductor Device Technology
  • Systems Analysis and Design

Technology Areas

  • Microelectronics