SAW Programmable Matched Filter Signal Processor.
Abstract
A monolithic surface wave programmable matched filter signal processor operating at 100 MHz was designed, fabricated and evaluated. The semiconductor and acoustic elements were developed on (001) n-type silicon oriented for acoustic transmission along the (100) direction. Surface acoustic waves at 100 MHz were generated by a zinc oxide film layer transducer into an array of 31 silicon-gate NMOS piezoresistive FET taps spaced at 10 ns intervals. The drain lines of all taps were connected to serve as the rf output. The phase and amplitude of each tap was controlled by a digital shift register and analog voltage to the tap gates. The die size for a single 31-bit filter was 0.980 inch by 0.120 inch. This development represented a significant step toward the realization of a compact, low cost highly versatile matched filter device for signal processing applications in communications equipment. Specific problem areas were solved. A quantitative assessment of various aspects of ZnO/Si-MOSFET technology was made and the viability of the monolithic integration of SAW and semiconductor circuitry on silicon was demonstrated.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 1980
- Accession Number
- ADA089199
Entities
People
- Fred Hickernell
Organizations
- Motorola Mobility