Growth and Characterization of Epitaxial Piezoelectric and Semiconductor Films.

Abstract

This report contains details of the research work carried out on a one-year project on the growth and characterization of ZnO and AlN piezoelectric thin films. Material growth systems are reported for ZnO using the zinc vapor reaction with CO2, ZnCl2 with O2, and the latest metal-organic process. The growth of insulating ZnO has been achieved using lithium doping during film growth. Initial results are reported for a new AlN growth process that shows promise of overcoming some previous growth problems. (Author)

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Jul 01, 1980
Accession Number
ADA091342

Entities

People

  • K. M. Lakin
  • S. K. Tiku

Organizations

  • University of Southern California

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Acoustic Waves
  • Aluminum Oxides
  • Chemical Synthesis
  • Chemical Vapor Deposition
  • Chemistry
  • Crystals
  • Electronics Industry
  • High Temperature
  • Material Degradation Processes
  • Materials
  • Materials Laboratories
  • Oxides
  • Surface Acoustic Wave Devices
  • Surface Acoustic Waves
  • Surface Roughness
  • Thin Films
  • Transducers

Fields of Study

  • Materials science

Readers

  • Semiconductor Device Technology
  • Technical Research and Report Writing.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene