Computer-Aided Engineering of Semiconductor Integrated Circuits

Abstract

Economical procurement of small quantities of high performance custom integrated circuits for military systems is impeded by inadequate process, device and circuit models that handicap low cost computer aided design. The principal objective of this program is to formulate physical models of fabrication processes, devices and circuits to allow total computer-aided design of custom large-scale integrated circuits. The basic areas under investigation are (1) thermal oxidation, (2) ion implantation and diffusion, (3) chemical vapor deposition of silicon and refractory metal silicides, (4) device simulation and analytic measurements. This report discusses the fourth year of the program.

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Document Details

Document Type
Technical Report
Publication Date
Jul 01, 1980
Accession Number
ADA091969

Entities

People

  • B. E. Deal
  • C. P. Ho
  • C. R. Helms
  • J. D. Meindl
  • J. D. Plummer
  • James F. Gibbons
  • Krishna C. Saraswat
  • R. W. Dutton
  • T. I. Kamins
  • W. A. Tiller

Organizations

  • Stanford University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Chemistry
  • Circuit Analysis
  • Computational Science
  • Electrical Properties
  • Electronics Laboratories
  • Energy Transfer
  • Fermi Levels
  • Field Effect Transistors
  • Finite Element Analysis
  • Integrated Circuits
  • Mass Spectrometry
  • Materials Science
  • Semiconductor Devices
  • Semiconductors
  • Spectra
  • Thermodynamics
  • Two Dimensional

Readers

  • Integrated Circuit Design and Technology.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics