Chemical Reactions at the Metal/Silicon Interface.
Abstract
This report includes the studies of Si(111) and Si(100) surfaces with Pd, Pt, Ni, and V metal overlayers leading to silicide formation. Experimental techniques utilized include ultraviolet photoemission spectroscopy, Auger electron spectroscopy, work function measurements and transmission electron microscopy.
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 31, 1980
- Accession Number
- ADA093316
Entities
People
- G. W. Rubloff
- P. S. Ho
- T. Y. Tan
Organizations
- IBM Thomas J. Watson Research Center