Numerical Methods for 2-Dimensional Modeling

Abstract

Progress toward the development of a fast algorithm for two- dimensional computational modeling of VLSI fabrication processes is described. The first report of an algorithm producing two-dimensional dopant profiles in seconds per process step is presented. A summary of investigations to date and plans for future work are discussed.

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Document Details

Document Type
Technical Report
Publication Date
Dec 01, 1980
Accession Number
ADA093843

Entities

People

  • W. D. Murphy
  • W. F. Hall

Tags

Communities of Interest

  • Advanced Electronics
  • Cyber

DTIC Thesaurus Topics

  • Boundaries
  • Boundary Value Problems
  • Computational Fluid Dynamics
  • Computational Science
  • Computers
  • Conformal Mapping
  • Coordinate Systems
  • Differential Equations
  • Diffusion
  • Equations
  • Finite Element Analysis
  • Fluid Dynamics
  • Fluid Flow
  • Grids
  • Mainframe Computers
  • Oxidation
  • Two Dimensional

Readers

  • Finite Element Method (FEM) for solving Partial Differential Equations (PDEs)
  • Materials Science and Engineering.
  • Technical Research and Report Writing.