An Investigation of the Techniques of Ellipsometry, Internal Reflection Spectroscopy, and Moment Analysis to the Study of Films and Substrates
Abstract
Ellipsometry and internal reflection spectroscopy (IRS) are two methods of spectroscopic measurement which have some unique advantages over other reflection techniques for the study of films and substrates. Applications of these methods are fully discussed for work in the infrared and visible spectral regions. Moment analysis of spectral band shapes has been shown theoretically to yield information on the nature of the intermolecular interactions in condensed phases. These data are vital if concentrations of molecular species are to be found in a film. The experimental difficulties of moment analysis are discussed along with some preliminary results using existing AEDC data. Areas for future research are suggested for the spectroscopic analysis of films.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1981
- Accession Number
- ADA093930
Entities
People
- Kent F. Palmer
- Michael Z. Williams
Organizations
- Arnold Engineering Development Complex