Theoretical Studies of Atom Surface Interactions

Abstract

A first principles kinetic theory was developed, applicable to angular and energy dependent emission in Electron Stimulated Desorption. Expressions for the ionic and neutral atoms ESD cross section were formulated and applied in a model calculations of 0+ emission from W(100) and W(111). Strong focusing of the outgoing ions was found. Off-axis spot groups were simulated and compared with experimental results.

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Document Details

Document Type
Technical Report
Publication Date
Feb 01, 1981
Accession Number
ADA095341

Entities

People

  • Narkis Tzoar

Organizations

  • City College of New York

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Boltzmann Equation
  • Charged Particles
  • Compound Semiconductors
  • Computational Science
  • Crystal Lattice Vibrations
  • Crystal Structure
  • Desorption
  • Electron Energy
  • Electron Gas
  • Energy Bands
  • Geometry
  • Kinetic Energy
  • Kinetic Theory
  • Metal Oxides
  • Semiconductors
  • Three Dimensional
  • Two Dimensional

Fields of Study

  • Physics

Readers

  • Electromagnetic Wave Scattering and Antenna Radiation Engineering
  • Plasma Physics.

Technology Areas

  • Microelectronics