Extremely Uniform Electrodeposition of Submicron Schottky Contacts.
Abstract
A plating technique has been developed that yields extremely uniform metal deposits on semiconductor surfaces. This technique utilizes high field pulses that are extremely short in duration. The technique has produced theoretical Schottky barrier diode spreading resistances for contacts with dimensions ranging from 2.5 to 0.12 micron in diameter. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 15, 1981
- Accession Number
- ADA097657
Entities
People
- Armond B. Chase
- Malcolm Mccoll
- Wilbur A. Garber
Organizations
- The Aerospace Corporation