Exploratory Studies of Electron Beam Oxide Densification.

Abstract

The objective of this study of electron beam densification of deposited oxides was not achieved by the end of the grant period due to unavailability of electron guns from the supplier during this time. The work however was modified and extended to encompass the general area of beam annealing. Several questions of direct interest were investigated experimentally after a general literature survey was completed. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1981
Accession Number
ADA098163

Entities

People

  • J. C. Wolfe

Organizations

  • University of Houston

Tags

DTIC Thesaurus Topics

  • Annealing
  • Dielectric Films
  • Electrical Engineering
  • Electron Beams
  • Electrons
  • Engineering
  • Films
  • Grain Size
  • Heat Treatment
  • Ion Implantation
  • Laser Beams
  • Lasers
  • Low Temperature
  • Materials
  • Pulsed Lasers
  • Resistance
  • Scattering

Fields of Study

  • Physics

Readers

  • Plasma Physics.
  • Powder metallurgy of Titanium alloys.
  • Systems Analysis and Design

Technology Areas

  • Directed Energy
  • Microelectronics
  • Microelectronics - Graphene