A Device for Cathode Sputtering,
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 11, 1981
- Accession Number
- ADA098442
Entities
People
- I. A. Radvanskiy
- S. M. Shalimov
- V. A. Meshkov
- V. A. Tfavetkov
- V. V. Kvasnikov
Organizations
- National Air and Space Intelligence Center