Monolithic ZnO SAW Structures.

Abstract

A range of ZnO-on-Silicon surface acoustic wave devices have been fabricated and tested. Both diode and magnetion rf sputtering was employed. A new transducer for the monolithic configuration was reported which permits increased operating frequencies. The first SAW resonator on silicon was constructed and operated. Both high Q and excellent temperature stability was observed. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Jun 01, 1981
Accession Number
ADA101078

Entities

People

  • R. F. Pierret
  • R. L. Gunshor

Organizations

  • Purdue University

Tags

DTIC Thesaurus Topics

  • Acoustic Waves
  • Air Force
  • Aluminum
  • Birds
  • Electrical Engineering
  • Engineering
  • Films
  • Frequency
  • Insertion Loss
  • Integrated Circuits
  • Materials
  • Reflectors
  • Resonant Frequency
  • Surface Acoustic Wave Devices
  • Surface Acoustic Waves
  • Surface Waves
  • Transducers

Readers

  • Electronics Engineering
  • Semiconductor Device Technology