Laser Ablation and Resonance Ionization Spectroscopy (LARIS) for Trace Analysis of Solids.
Abstract
A new analytical technique has been developed for the detection of trace sodium impurity in single crystal silicon using laser ablation and resonance ionization spectroscopy. Sodium is detected in the ablated vapor by using two tunable laser probes to induce resonantly enhanced multiphoton ionization via the intermediate 3P and 4D levels. At present, the technique provides only relative quantitative results. For absolute quantitative results, characterization of complex laser-solid interaction phenomena in a buffer gas is required. The minimum detectable sodium density in the solid is estimated to be about 10 to the 11th power atoms/cu cm. Generalization of this technique to other impurities is limited only by laser availability. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1980
- Accession Number
- ADA102234
Entities
People
- G. G. Luther
- S. Mayo
- T. B. Lucatorto
Organizations
- National Institute of Standards and Technology