Energy Levels in and on an Oxide Film as Measured by Electrochemical Methods.

Abstract

Studies were made of the oxide layer over silicon, using electrochemical methods (supplemented at times by MOS measurements). The most important conclusion, an early conclusion that provided the key to interpreting many subsequent observations, was that alkali ions diffuse readily into SiO2 from solution. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Aug 01, 1981
Accession Number
ADA103704

Entities

People

  • S. R. Morrison

Organizations

  • SRI International

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Alkali Metals
  • Chemistry
  • Contracts
  • Diffusion
  • Electric Fields
  • Electrodes
  • Energy Levels
  • Films
  • High Temperature
  • Impurities
  • Metal Oxides
  • Metals
  • Observation
  • Oxide Films
  • Oxides
  • Silicon
  • Silicon Dioxide

Readers

  • Electrochemical Engineering/ Fuel Cell Technologies
  • Semiconductor Device Technology
  • Systems Analysis and Design