Piezoelectric ZnS Film on Silicon.
Abstract
The objective of the present research investigation is to theoretically analyze the electromechanical coupling of piezoelectric zinc sulfide films on silicon substrates. During the past twelve months, considerable efforts have been made in analyzing the experimental results which were obtained in FY 1979. In order to accomplish this, a computer program was written to calculate surface-acoustic-wave electromechanical coupling constants for layered media. The calculation included four configurations of the excitation of surface acoustic waves in different orientations of silicon using cubic and hexagonal ZnS films. The calculated results showed that the best acoustic coupling for ZnS films is 0.0001 which is an order of magnitude smaller than ZnO films on silicon. Also included in this report is the calculation of ZnO films on fused quartz and various orientation of silicon. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 1981
- Accession Number
- ADA105161
Entities
People
- Edward J. Staples