On the Use of AsH3 in the Molecular Beam Epitaxial Growth of GaAs.

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Document Details

Document Type
Technical Report
Publication Date
Dec 26, 1980
Accession Number
ADA105409

Entities

People

  • Arthur R. Calawa

Organizations

  • Massachusetts Institute of Technology

Tags

Communities of Interest

  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Air Force
  • Analyzers
  • Chambers
  • Chemistry
  • Dissociation
  • Electrical Properties
  • Electron Mobility
  • Electrons
  • Epitaxial Growth
  • Heat Of Activation
  • Impurities
  • Ionization Chambers
  • Mobility
  • Molecular Beam Epitaxy
  • Molecular Beams
  • Partial Pressure
  • Substrates