Polymeric Microelectronics.
Abstract
Our basic goal has been to evaluate the suitability of polymer systems for use in adaptive optics. Structures such as the electrostatically controlled mirrors and lenses described in this report require the mating of materials relatively new to electronics applications with microfabrication technology. Microprocessor technology will be essential in electronically calibrating structures with little inherent optical quality. The resultant devices should be small, inexpensive, and should require low power and voltages since no mechanical motion is employed. In the case of deformable mirrors, analysis indicates that elastomer microstructures should be capable of larger deformations than conventional adaptive optical components. Microfabrication creates structures with large area-to-volume ratios. Thus electrostatic forces can overcome inertial forces. We have verified that such materials can be spread in thin sheets and formed into islands smaller than 20 micrometers on a side. The techniques developed depend on using elastomers which can serve as resist. Exposed to ultraviolet light through a mask, they are chemically altered and the unwanted portions can then be washed away. We have also demonstrated that conductive and reflective metal electrodes can be deposited using low temperature conditions. The thin films created should not stiffen the polymer appreciably. Indium is the best material for use in these structures.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 1981
- Accession Number
- ADA105707
Entities
People
- Dennis Cleverly
- Edward Balizer
- I. H. Loh
- Stephen T. Kowel
- T. T. Su
Organizations
- Syracuse University