Development of Thin Conducting Film Fabrication Methods.
Abstract
Fabrication of seamless cylindrical pyrolitic carbon foils with 5 cm radius, 2 cm height, and thickness as low as 10 micro g/sq cm was investigated. Chemical vapor deposition at 1050 C, flowing 1 part methane in 25 parts Argon at 4 l/min through a 5 in diameter, 12 in tall graphite susceptor containing a stack of 5 cm radius, 2 in tall fused silica cylinders for 1 to 2 hours resulted in reproducible formation of pyrolitic carbon films weakly bonded to the inner surface of the fused silica cylinders. The carbon films ranged from < 20 to 100 micro g/ sq cm, depending on deposition time. It proved possible to transfer the carbon foils intact from the formation mandrel (fused silica) to various intermediate mandrels (beeswax, polymeric resins such as PVA, PVC, PBS, Saran). Efforts to transfer the foils intact from formation on intermediate mandrels to electrode rings (to obtain free standing foils) were not successful for masses below 600 micro g/sq cm. However, polymeric resin cylinders 600 micro g/sq cm were readily made. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 01, 1979
- Accession Number
- ADA106718
Entities
People
- G. W. Brassell