Annual Technical Report 1 June 1980-31 May 1981.

Abstract

The University of Chicago (UC) and Hughes Research Laboratories (HRL) collaborative program aims at the development and construction of two 60 keV high resolution, high current density ion microscopes/microprobes over a three year period. Using existing low resolution probes at UC and HRL, design studies have been conducted to determine: (a) the energy spectra of gallium ions emitted by a liquid metal (LM) source; (b) the optimum operating condition of the source; (c) the limitations of various image display methods at high and low probe currents; (d) the current yields of several metal ions from LM sources. Optical calculations have been performed to optimize the design of the new microprobe column. An overall system design has been formulated and assembly and engineering drawings completed. Equipment and parts to be procured have been selected. The UC existing probe has been used to continue basic research studies of ion-solid interactions. These include the interaction of molecular hydrogen ions with thin solid foils, ion-induced secondary electron emission, and damage to light element targets under gallium ion bombardment. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Jul 24, 1981
Accession Number
ADA106785

Entities

People

  • Riccardo Levi-setti

Organizations

  • University of Chicago

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Assembly
  • Current Density
  • Electron Emission
  • Electrons
  • Elements
  • Emission
  • Engineering
  • Engineering Drawings
  • High Resolution
  • Instrumentation
  • Ion Beams
  • Ion Bombardment
  • Ion Sources
  • Ions
  • Liquid Metals
  • Photoexcitation
  • Protons

Fields of Study

  • Physics

Readers

  • Pulsed Power and Plasma Physics.
  • Research Science/Academic Research
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics