Defect Detection and Identification in Si3N4 and SiC Using Controlled Reluctance Electromagnetic Test Methods.

Abstract

This test studied the feasibility of defect detection in Si3N4 and SiC using high frequency (32 MHz) electromagnetic techniques and focused field CREG test probes. Examined were test specimens which contained near surface defects - hardness indentation induced cracks, scratches, pits, and inclusions. While unable to detect cracks in the test pieces, it successfully demonstrated the ability to detect certain other defects - 19 microns high scratches in SiC, for example. Also observed were variations in electromagnetic signals which seemed to reflect variations in electrical and dielectrical properties of the test pieces, possibly due to variation in specimen microstructures and/or chemistry.

Document Details

Document Type
Technical Report
Publication Date
Oct 01, 1981
Accession Number
ADA107726

Entities

People

  • Duane P. Johnson
  • E. Kim Kietzman

Tags

DTIC Thesaurus Topics

  • Chemistry
  • Defect Detection
  • Defects (Materials)
  • Detection
  • Frequency
  • Hardness
  • Identification
  • Inclusions
  • Microstructure
  • Test Methods

Fields of Study

  • Materials science

Readers

  • Electromagnetic Wave Scattering and Antenna Radiation Engineering
  • Materials Science and Engineering.
  • Semiconductor Device Technology