Acoustic Microscopy for Nondestructive Evaluation of Materials
Abstract
This report covers the results of a research program on Acoustic Microscopy directed toward the study of integrated circuits and solid materials. This new type of microscopy permits one to examine microscopic features that are unaccessible in the optical microscope. Thus detail beneath metallization layers as well as the grain boundaries in polished samples can be examined without resorting to chemical etching. Adhesion of thin film is a field where acoustic microscopy will play an important role.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 01, 1981
- Accession Number
- ADA108423
Entities
People
- Calvin Quate
Organizations
- Stanford University