Numerical Methods for 2-Dimensional Process Modeling

Abstract

Detailed documentation for a user's version of the 2-D process modeling code developed under the present contract has been completed, and is provided as an appendix to this report. This code, which has been named MEMBRE (for Multidimensional Efficient Moving Boundary Redistribution), will follow a single dopant type through multiple process cycles typical of MOSFET fabrication, including nonuniform growth of a field oxide. Input of data is made in the SUPREM format, utilizing as far as possible, subroutines from SUPREM. Simulation of dopant redistribution during a complete fabrication schedule typically requires a few minutes of CPU time on the IBM 3033 or 370/168. A CDC version of the code runs approximately two-and-one-half times faster on the Cyber 176.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1982
Accession Number
ADA110431

Entities

People

  • C. D. Maldonado
  • S. A. Louie
  • W. D. Murphy
  • W. F. Hall

Tags

Communities of Interest

  • Advanced Electronics
  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Algorithms
  • Boundary Value Problems
  • Chemical Reactions
  • Computational Science
  • Computer Programs
  • Computers
  • Department Of Defense
  • Difference Equations
  • Differential Equations
  • Equations
  • Fluid Dynamics
  • Geometry
  • Ion Implantation
  • Linear Systems
  • Simulators
  • Three Dimensional
  • Two Dimensional

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  • Computational Fluid Dynamics (CFD)
  • Computer Science.
  • Materials Science and Engineering.

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  • Cyber
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