Optimization Study of 256-Element IR-CCD.

Abstract

A 256-element platinum silicide Schottky-barrier IR-CCD line sensor, developed under a prior contract, was fabricated to a matrix of processing variations and mask modification in an effort to improve the performance of the device. A new device, tC1258, resulted from the optimization study. This report details the wafer fabrication and packaging by wafer lot of all devices processed as an aid to the sponsor in evaluating the arrays. (Author)

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Nov 01, 1981
Accession Number
ADA110620

Entities

People

  • F. V. Shallcross
  • H. G. Erhardt
  • W. F. Kosonocky

Organizations

  • Sarnoff Corporation

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Air Force
  • Aluminum
  • Capacitance
  • Charge Coupled Devices
  • Contracts
  • Detectors
  • Diffusion
  • Digital Images
  • Diodes
  • Electrodes
  • Elements
  • Fabrication
  • Guard Rings
  • Metal-Semiconductor Junctions
  • Metals
  • Schottky Diodes
  • Standards

Readers

  • Integrated Circuit Design and Technology.
  • Semiconductor Device Technology
  • Software Engineering