Fabrication of Thin Wall Cylindrical Shells by Sputtering.

Abstract

This report describes the process used to fabricate thin wall cylindrical shells by sputtering. The shells are grown on both sacrificial aluminum and reuseable stainless steel mandrels. The post deposition process used to remove the shells from the mandrels is described. The effect of deposition conditions and post deposition treatment on crystallographic structure is presented. Comparisons of sputtered shells are made with conventionally machined ones as pertains to dimensional uniformity and performance. Test results of sputtered thin wall cylindrical shells used as pressure sensing elements are given.

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Document Details

Document Type
Technical Report
Publication Date
Nov 30, 1981
Accession Number
ADA111649

Entities

People

  • E. L. Paradis

Organizations

  • United Technologies Corporation

Tags

Communities of Interest

  • Advanced Electronics
  • Air Platforms
  • Energy and Power Technologies
  • Sensors

DTIC Thesaurus Topics

  • Accuracy
  • Aircrafts
  • Barometric Pressure
  • Cold Working
  • Control Systems
  • Fabrication
  • Mach Number
  • Magnetic Fields
  • Magnetic Properties
  • Manufacturing
  • Materials
  • Measurement
  • Mechanical Properties
  • Mechanical Working
  • Pressure Measurement
  • Pressure Transducers
  • Resonant Frequency

Fields of Study

  • Materials science
  • Physics

Readers

  • Metallurgy
  • Nanofabrication and Microfabrication.
  • Structural Dynamics.