Study of the Physics of Insulating Films as Related to the Reliability of Metal-Oxide-Semiconductor (MOS) Devices
Abstract
This report covers work on enhanced electron injection into SiO2, studies of limitations on the number of useful write/erase cycles for EAROS devices due to electron trapping in the SiO2, the physics and design of EAROS devices using Si-rich SiO2 charge injectors, and the capture and release of electrons on Na(+)-related sites in SiO2. An automatic system is described for making write/erase cycling measurements of EAROS devices.
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 01, 1982
- Accession Number
- ADA112501
Entities
People
- D. J. Dimaria
- D. W. Dong
- J. A. Calise
- K. M. Demeyer
- L. M. Ephrath
Organizations
- IBM Thomas J. Watson Research Center