Electrooptical Devices.
Abstract
The spectral dependence of the optical absorption introduced in InP and GaInAsP by proton bombardment has been measured as a function of dose. A study has been made of the etching technique used to delineate the active GaInAsP layer in GaInAsP/InP double-heterostructure lasers. A new method has been demonstrated for the prevention of thermal etching or decomposition of InP substrates prior to liquid-phase-epitaxial (LPE) growth. High-quality n(+) -InP layers over InGaAs have been grown from Sn solutions.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 31, 1981
- Accession Number
- ADA112890
Entities
People
- Charles E. Hurwitz
Organizations
- Massachusetts Institute of Technology