Workshop on the Interaction of Laser Radiation with Surfaces for Application to Microelectronics, 4-5 May 81.
Abstract
A workshop was held which was devoted to the physics and chemistry of new optical processing and analysis techniques on surfaces for materials and structures of interest in microelectronics. It contained tutorial papers on topics of general interest to this technical area and reviewed progress in ongoing research. In addition, selected short talks describing recent results were presented. The workshop included talks from various groups throughout the United States and Europe.
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 31, 1981
- Accession Number
- ADA115146
Entities
People
- Richard M. Osgood
Organizations
- Massachusetts Institute of Technology