Superconductive Niobium Oxide Tunnel Device Program.
Abstract
The purpose of this program was to develop the technology for the fabrication of small-area Josephson tunnel junctions with niobium electrodes for use as microwave detectors and mixers. Niobium-niobium oxide-lead junctions were used to establish processes for sputter cleaning and sputter oxidizing the niobium base electrode. When these processes were established, niobium-niobium oxide-niobium junctions were made by sputtering the base electrode, sputter cleaning and sputter oxidizing the base electrode in a sputter deposition system with backsputter capability, and evaporating the upper electrode in an electron-beam evaporation system. Experiments were also done to make junctions with aluminum-oxide barriers. The report is divided into seven parts: (1) vacuum systems, (2) masks for photolithography, (3) processing techniques, (4) niobium-niobium oxide-lead junctions, (5) niobium-niobium oxide-niobium junctions, (6) niobium-aluminum oxide-aluminum-niobium junctions, (7) summary and conclusions.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 15, 1982
- Accession Number
- ADA117000
Entities
People
- Spencer A. Buckner
Organizations
- Texas Instruments