CO2 Laser Waveguiding in GaAs MBE Layers.
Abstract
In this report, experimental analyses of the electronic and optical properties of a prototype single layer MBE (Molecular Beam Epitaxy) waveguide are presented. A polished (100) wafer of n(+)-GaAs heavily doped with silicon was used as the waveguide substrate. The free carrier concentration was approximately 3 x 10 to the 18th power/cc. An epitaxial layer of n-GaAs lightly doped with tin was then grown on the substrate. The carrier concentration of the epitaxial layer was targeted to be 3 - 5 x 10 to the 15th power/cc.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 18, 1982
- Accession Number
- ADA117394
Entities
People
- Howard A. Jenkinson
- John M. Zavada
Organizations
- United States Army Armament Research, Development and Engineering Center