Growth and Characterization of In(1-x)Ga(x)As(y)P(1-y) and GaAs Using Molecular Beam Epitaxy.

Abstract

This report describes the technical accomplishments of a two-year basic research program directed towards a study of GaAs and the quaternary III-V alloy system, In(1-x)Ga(x)As(y)P(1-y), grown by molecular beam epitaxy (MBE). Layers suitable for application of these materials, together with related binary and ternary systems, to microwave, millimeter and optical devices were targeted. Doping profiles in GaAs which are difficult to produce by techniques other than MBE and which potentially offer enhanced characteristics for specific GaAs microwave and millimeter wave devices have been produced. InAs layers grown on InGaAs buffer layers have exhibited electron mobilities exceeding 30,000 cm(2)V(-1)s(-1) at 77 deg K. InP layers have been grown and analyzed using photoluminescence which demonstrated the existence of iron out-diffusion from the Fe-doped InP substrate. InGaAs layers grown in a heterostructure FET system showed an improvement in electron mobilities over those of GaAs FETs grown under similar conditions.

Document Details

Document Type
Technical Report
Publication Date
Feb 01, 1982
Accession Number
ADA117507

Entities

People

  • D. W. Covington
  • E. L. Meeks
  • F. L. Eisele
  • G. D. Holah

Organizations

  • Georgia Tech

Tags

DTIC Thesaurus Topics

  • Absorbers (Materials)
  • Advanced Materials
  • Electron Mobility
  • Electrons
  • Engineered Materials
  • Epitaxial Growth
  • Field Effect Transistors
  • Heterojunctions
  • High Electron Mobility Transistors
  • Materials
  • Microwaves
  • Millimeter Waves
  • Mobility
  • Molecular Beam Epitaxy
  • Molecular Beams

Fields of Study

  • Materials science

Readers

  • Semiconductor Device Technology

Technology Areas

  • 5G
  • Microelectronics