An Analytical Model for rf Inductive Glow Discharge Columns in Metal-Gas Mixtures and Application to the Rb-Xe System.
Abstract
The electron balance equation is solved for a glow discharge column excited by rf induction in a metal vapor - noble gas mixture where the metal atoms are ionized in a single step and ionization of the gas is negligible. The accumulation of metal atoms near the wall is accounted for by postulating for their radial distribution n(r), a power law with positive exponent. Under this condition, the profile for the electron density ne(r) can be expressed by zero order Bessel functions containing a profile parameter q that is related to the exponent in the atomic distribution n(r), q is evaluated as a function of rf power input and electron temperature Te for a fixed column radius R = 0.4 cm by solving the electron energy balance equation for Te does not equal f(r).
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 12, 1982
- Accession Number
- ADA118346
Entities
People
- Hans U. Eckert
Organizations
- The Aerospace Corporation