Calibration of a Mass Spectrometer for Analysis of Ultramicro Gas Samples Using a Dynamic Method of Analysis.
Abstract
A special-purpose mass spectrometer was allocated to analyze very small amounts of residual gases in electronic devices, principally traveling wave tubes. Because of device-related constraints that made it necessary to transport ultramicro amounts of gas to the analyzer, a dynamic method of analysis was adopted. Using calibrated leak sources, reliable transport and reproducible analyses of ultramicro amounts of gases were demonstrated with seven gases over a four-decade range. For inert gases, the reproducible analytical range extended below 10 to the -11th power atm/cu cm. Extensive calibrations were carried out with eight gases by using both the residual gas analyzer and the ionization gauge as detection instruments. These data, as well as the results of residual gas analyses conducted with production-quality traveling wave tubes, have validated the dynamic method of analysis. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 16, 1982
- Accession Number
- ADA119494
Entities
People
- Donald E. Gilmartin
- Wendell M. Graven
Organizations
- The Aerospace Corporation