Solid State Standard Addition Method in Secondary Ion Mass Spectrometry for Improvement of Detection Limits.
Abstract
The technique of solid state standard addition is inadequate for the determination of low dopant concentrations present in real semiconductor samples. An extension of the solid state standard addition method using computer controlled signal integration is shown to lower the detection limit of boron in silicon by an order of magnitude. The precision and accuracy of this method were found to be 25% and 12%, respectively. (Author)
Document Details
- Document Type
- Technical Report
- Publication Date
- Sep 22, 1982
- Accession Number
- ADA119751
Entities
People
- George H. Morrison
- Paul K. Chu
Organizations
- Cornell University Department of Chemistry and Chemical Biology