Techniques for Investigating Structure and Composition with High Spatial Resolution.

Abstract

The techniques of scanning transmission electron microscopy and field ion microscopy/atom probe are briefly described. The advantages of these techniques for high spatial resolution compositional analysis are discussed and examples cited. (Author)

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Document Details

Document Type
Technical Report
Publication Date
Dec 01, 1981
Accession Number
ADA119919

Entities

People

  • John B. Vander Sande

Organizations

  • Massachusetts Institute of Technology

Tags

Communities of Interest

  • Air Platforms
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Boundaries
  • Cells
  • Cellular Structures
  • Chemical Analysis
  • Chemistry
  • Chromium
  • Detectors
  • Materials
  • Materials Science
  • Measurement
  • Microscopes
  • Microscopy
  • Microstructure
  • Particles
  • Precipitates
  • Solidification
  • X Rays

Readers

  • Systems Analysis and Design
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics